The application of silicon carbide ceramic guide rails are:
silicon carbide ceramic guide rail, is one of the core components of semiconductor lithography machine, applied to: Silicon carbide ceramic air flotation motion platform, silicon carbide ultra-precision moving platform, silicon carbide guide rail, silicon carbide slide rail, silicon carbide vacuum suction cup, silicon carbide reflector, silicon carbide crossbeam, silicon carbide workpiece table, etc. the main function is to carry the wafer to perform high-speed ultra-precision motion along the designated movement trajectory and complete a series of exposure required actions. this includes loading and unloading, alignment, wafer profile measurement and exposure, etc. It is required to achieve nanometer-level motion accuracy under high-speed movement conditions.