Wafer pin silicon carbide chuck (also call wafer clamping), is industrial chuck commonly used in the semiconductor industry , with high temperature resistance, corrosion resistance, wear resistance and other characteristics. It is usually made of silicon carbide or alumina ceramic material with a raised point-like structure on the surface to provide better adsorption and stability.
Prealigner chuck are widely used in semiconductor production equipment to absorb, fix, transfer and handle silicon wafers, wafers and various workpieces and materials.